- Maker: MKS
MODEL: ASTRON 2L
MKS PN:AX7651-2
Condition: USED
Quantity: 1
Unit Price: Ask
Description: REV:E REMOTE PLASMA SOURCE RPS GENERATOR
During the refurbishment of Remote Plasma Source (RPS) we
perform the anodization of Process chamber (based on OEM
specification) made with higher thicknessto extend lifetime.
The repair process of RPS includes precise dimensional controls
and replacement of all defective parts and power parts as a
preventive measure against failure
To manage minimum production downtime, exchange options and Emergency service.
ASTRON i 2L AX7650 AX7651 AX7657 AX7660
PN:0920-00013/0190-41326
ASTRON I 3L
0190-47768/0190-26744/0190-24886/0190-41329
ASTRON ex 6L
0920-00131/0920-00057/0190-40602
R*evolution
AX-7690/AX-7695/AX-7696
The MKS ASTRON 2L Remote Plasma Source (model AX7651‑2) is a compact, self‑contained unit that generates a high‑density stream of reactive radicals for downstream CVD, PVD and chamber‑cleaning processes. Designed for semiconductor manufacturing, it combines a low‑field toroidal RF plasma generator with an integrated control module, delivering reliable performance in a desktop‑size package.
Technical Specifications (Main Parameters)
Model: AX7651‑2 (ASTRON 2L)
Power: 0‑20 kW RF (13.56 MHz)
Gas Flow: ≤30 SLM NF₃ (can be mixed with Ar)
Operating Pressure: 0.5‑10 Torr (typical 5 Torr)
Voltage/Current: 0‑32 V / 0‑1.2 A (power module)
Dimensions: approximately 400 mm × 350 mm × 310 mm,
weight approx. 38 kg
Material: all-aluminum anodized chamber, low surface recombination coefficient
Why Choose MKS ASTRON 2L?
High Dissociation Rate and High Flow:
Achieves >95 % fluorine gas dissociation, improving cleaning efficiency.
Reliable Low Particle Output
Reduces process defect risks, enhancing yield.
Easy Integration
Standard communication interface and compact form factor, allowing quick installation on existing tools.
Global Service Network
Factory refurbishment and technical support ensure long-term availability.
About Us
Semivacuums is a leading provider of high-quality semiconductor components, offering a massive inventory of over 50,000 items. We pride ourselves on sourcing components directly from operational machines, ensuring functionality and reliability. Our commitment to affordability and efficiency makes us a preferred choice for businesses seeking cost-effective solutions. With fast global delivery and professional packaging, we minimize downtime and ensure your components arrive safely and promptly. Choose Semivacuums for unparalleled service and quality in the semiconductor industry.
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FAQ
Who are we?
Semivacuums specializes in providing high-quality semiconductor components sourced from operational machines.
How do we guarantee quality?
We ensure quality by sourcing components directly from production lines, guaranteeing functionality and reliability.
What can you buy from us?
Our offerings include RF generators, DC power supplies, vacuum pumps, and various semiconductor components.
Why choose us over other suppliers?
We offer cost-effective pricing, high-quality products, and fast global delivery, ensuring efficiency and reliability.
What services do we provide?
We provide professional packaging, fast delivery, and exceptional customer support throughout the product lifecycle.
How quickly can I receive my order?
We deliver worldwide within 2-3 business days, ensuring your components arrive safely and quickly.
