- Brand:MKS
- MKS MODEL NO:51B11TGA1BA010
- Range:10torr
Key Technical Specifications
| Parameter |
Specification |
| Full‑scale range |
10 Torr (1.38 kPa) |
| Accuracy |
±0.5 % FS (full scale) |
| Temperature coefficient |
±0.07 % FS/°C |
| Response time |
< 20 ms |
| Materials |
Exposed surfaces of Inconel and 316L stainless steel – corrosion‑resistant, high‑temperature tolerant |
| Interface |
1/4‑in. VCR (NW‑16 ISO‑KF) |
| Operating temperature |
0 °C – 50 °C |
| Contact output |
Optional relay contacts for alarms, valves or PLC integration |
Main Advantages
- Fast switching – < 20 ms response guarantees immediate shut‑off or alarm when pressure excursions occur, protecting pumps and process chambers.
- Robust construction – All‑metal welded design with Inconel/316L exposure eliminates drift caused by corrosion or gas attack.
- Easy integration – Standard VCR connector and 9‑pin Type‑D electrical interface allow direct connection to MKS controllers or third‑party PLCs.
- High precision – ±0.5 % FS accuracy (with temperature‑compensated drift) meets the stringent requirements of semiconductor, lithography and thin‑film deposition processes.
- Adjustable set‑point – Trip point can be set from 5 % to 100 % of full scale, supporting forward, reverse or zero‑offset calibration modes.
Typical Application Scenarios
| Industry |
Example Use |
| Semiconductor manufacturing |
Vacuum protection for thin‑film deposition and etch chambers, preventing pressure spikes that cause film defects. |
| Research laboratories |
Safety interlock for vacuum pump stations, ensuring automatic shutdown when pressure exceeds safe limits. |
| Vacuum packaging |
Monitoring vacuum levels in food or pharmaceutical packaging lines to avoid package rupture. |
| Optical coating |
Pressure‑threshold control during vacuum evaporation or magnetron sputtering processes. |
| Gas analysis |
Protecting mass spectrometers from pressure excursions that could degrade measurement accuracy. |
Selection & Procurement Guide
- Confirm range – Choose the 51B11TGA2BA010 when the system operates within 0 – 10 Torr; for higher or lower ranges, consider other MKS Baratron series (e.g., 51C, 41B).
- Match the interface – Ensure the vacuum line uses a 1/4‑in. VCR (NW‑16 KF) fitting; adapters are available for other sizes.
- Electrical requirements – Verify the controller’s input voltage (typically 20‑30 VDC) and output type (relay or analog) and select the appropriate electrical option.
- Environmental conditions – If operating temperatures may exceed 0 – 50 °C, a heated Baratron model (e.g., 142A series) should be considered to prevent gas adsorption.
Frequently Asked Questions (FAQ)
-
Q1: Does the switch support digital signal output?
- A: The standard model provides a 9‑pin Type‑D mixed analog/digital interface, supporting 0‑10 VDC or 4‑20 mA outputs. For pure digital protocols (Modbus, CAN), an optional MKS signal‑conditioning module can be added.
-
Q2: How is the device calibrated?
- A: Use the MKS calibration kit (e.g., PBTS1A portable standard) for a one‑time full‑scale calibration. Routine verification is recommended every six months.
-
Q3: Is it suitable for corrosive gases?
- A: Yes. The Inconel/316L construction resists most corrosive gases such as HF and Cl₂, making it ideal for harsh vacuum environments.
Conclusion
The MKS 51B11TGA2BA010 Baratron pressure switch combines a 10 Torr range, ±0.5 % FS accuracy, rapid response, and all‑metal corrosion‑resistant construction to become the preferred component for vacuum system protection. Whether in high‑end semiconductor fabrication, academic research, or industrial vacuum packaging, it delivers reliable pressure monitoring and swift cut‑off, helping users reduce equipment downtime and improve process yield.
